UV-Laser cutting for silicon MEMS prototyping

Improving etching rate and quality

Conference paper (2014)

Authors

M. D'Auria Imperial College London
N. Tolou Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design