Design and preliminary fabrication of a new micromachined silicon strain sensor based on the campaniform sensillum of insects

Wicaksono, DHB; Pandraud, G.; Craciun, G; Goosen, J.F.L.; van Duyl, WA; Vincent, JFV; French, P.J.

Design and preliminary fabrication of a new micromachined silicon strain sensor based on the campaniform sensillum of insects

Conference paper (2004)

Authors

DHB Wicaksono Electronic Instrumentation -

G. Pandraud Electronic Instrumentation -

G Craciun Electronic Instrumentation -

J.F.L. Goosen Electronic Instrumentation -

WA van Duyl Electronic Instrumentation -

JFV Vincent External organisation

P.J. French Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:590b538b-080c-4080-b443-36d37f905afe

More Info

expand_more

Published Date

2004

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation