Design, fabrication and testing of assembly features for enabling sub-micron accurate passive alignment of photonic chips on a silicon optical bench

Conference paper (2012)

Authors

J.F.C. van Gurp Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2012

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering