Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

Lorito, G.; Gonda, V; Liu, S.; Scholtes, T.L.M.; Schellevis, H; Nanver, L. K.

Reliability issues related to laser-annealed implanted back-wafer contacts in bipolar silicon-on-glass processes

Conference paper (2006)

Authors

G. Lorito Old - EWI Sect. ECTM

V Gonda Electronic Components, Technology and Materials

S. Liu External organisation

T.L.M. Scholtes Electronic Components, Technology and Materials

H Schellevis Electronic Components, Technology and Materials

L. K. Nanver Electronic Components, Technology and Materials

Research Group

Old - EWI Sect. ECTM

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Published Date

2006

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Research Group

Old - EWI Sect. ECTM

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