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Journal article (2016)

Authors

H.P. Vuong Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Ron van Ostayen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2016

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Contactless transport for high-tech industrial applications by applying a thin pressurised air film beneath a substrate. High-precision positioning accuracy in the nm range and multiple-g accelerations have already been achieved in the lab.

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