Electrical and physical properties of polysilicon film resistors modified by excimer laser annealing

Soares, FM; van den Berg, MR; Nanver, L.K.; Visser, C.C.G.; Grimm, K; Slotboom, JW

Electrical and physical properties of polysilicon film resistors modified by excimer laser annealing

Conference paper (2000)

Authors

FM Soares Microwave Technology and Systems for Radar

MR van den Berg Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

C.C.G. Visser Electronic Components, Technology and Materials -

K Grimm External organisation

JW Slotboom Electronic Components, Technology and Materials -

Research Group

Microwave Technology and Systems for Radar

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Published Date

2000

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Research Group

Microwave Technology and Systems for Radar