The role of the silyl radical in plasma deposition of microcrystalline silicon

Journal article (2004)

Authors

C Smit Electronic Components, Technology and Materials
R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials
EAG Hamers External organisation
MCM van de Sanden External organisation
Research Group
Electronic Components, Technology and Materials
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Published Date

2004

Language

Undefined/Unknown

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Research Group

Electronic Components, Technology and Materials

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