SEM resolution improvement at low voltage with gun monochromator.

Barth, JE; Nijkerk, MD; Mook, HW; Kruit, P.

SEM resolution improvement at low voltage with gun monochromator.

Conference paper (2000)

Authors

JE Barth ImPhys/Charged Particle Optics

MD Nijkerk ImPhys/Charged Particle Optics

HW Mook ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2000

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Research Group

ImPhys/Charged Particle Optics