Experimental characterization of roughness induced scattering losses in PECVD SiC waveguides

Pandraud, G.; Margallo-Balbás, E; Yang, C.; French, P.J.

Experimental characterization of roughness induced scattering losses in PECVD SiC waveguides

Journal article (2011)

Authors

G. Pandraud Electronic Components, Technology and Materials -

E Margallo-Balbás External organisation

C. Yang Electronic Instrumentation -

P.J. French Electronic Instrumentation -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:4e5b2c0d-2c58-4619-8881-0ab5664aa8c7

More Info

expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials