Focused Electron Beam Induced Deposition of 1,1-dichloro-1-silacyclohexane, silacyclohexane and 1,3,5-trisilacyclohexane; preliminary study on the role of low energy secondary electrons in the deposition process

Journal article (2015)

Authors

O Ingolfsson External organisation
R. Kumar External organisation
Cornelis W. Hagen ImPhys/Charged Particle Optics
. Srikanth Hari Novel Aerospace Materials - Aerospace Engineering
Research Group
ImPhys/Charged Particle Optics
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Published Date

2015

Language

English

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Research Group

ImPhys/Charged Particle Optics