Low voltage electroosmotic pump for high density integration into microfabricated fluidic systems

Journal article (2011)

Authors

FCA Heuck Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
U. Staufer Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2011

Language

English

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

A low voltage electroosmotic (eo) pump suitable for high density integration into microfabricated fluidic systems has been developed. The high density integration of the eo pump required a small footprint as well as a specific on-chip design to ventilate the electrolyzed gases emerging at the platinum (Pt) electrodes. For this purpose, a novel liquid¿gas (lg) separator was invented. This lg-separator separated the gas bubbles from the liquid and guided them away from the eo pump. Its operational principle was solely based on the geometry of tapered sidewalls. An eo pump sandwiched by two lg separators (microchannels in the range of 10 lm, footprint of 100 lm 9 15 lm) was experimentally investigated. The lg-separator was able to reliably separate and ventilate an emerging gas flow of 2 pl s-1. The eo pump achieved flow rates of 50 pl s-1 at actuation voltages of 5 V.