High-aspect-ratio through-wafer parylene beams for stretchable silicon electronics

Conference paper (2008)

Authors

T. Zoumpoulidis Old - EWI Sect. ECTM
M. Bartek Old - EWI Sect. ECTM
P de Graaf External organisation
R. Dekker Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM