Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system

Wei, J.; Ye, H.; van Zeijl, H.W.; Sarro, Pasqualina M; Zhang, GQ

Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system

Conference paper (2012)

Authors

J. Wei Electronic Components, Technology and Materials -

H. Ye Electronic Components, Technology and Materials -

H.W. van Zeijl Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

GQ Zhang External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:4579934d-9cf3-433c-8776-f57a9057d86c

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials