Monolithic integration of a calorimetric microfluidic flow sensor using flat panel display technology

Conference paper (2024)

Authors

B. de Wagenaar Student, Holst Centre
Frennie Bens Holst Centre
Alfredo Mameli Holst Centre
Auke Kronemeijer Holst Centre
Agnes Bußmann Fraunhofer EMFT
Bogdan Firtat National Institute for Research and Development in Microtechnologies (IMT)
M. Mastrangeli Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2024

Language

English

Reuse Rights

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Research Group

Electronic Components, Technology and Materials

Abstract

This abstract describes the design, simulation and experimental characterization of a thin film thermal flow sensor fabricated using flat panel display technology. Patterned microelectrodes were successfully applied as a thermal flow sensor, showing good correlation between experimental and simulated data. The use of flat panel display technology could provide an interesting option for cost-effective integration of flow sensing in Organ-on-Chip technologies.

Files

MFHS2024_paper_8-full.pdf
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