On chip measurement for side-wall roughness in SOI waveguides by atomic force microscopy

Conference paper (2008)

Authors

C. Yang Electronic Instrumentation
E Margallo Balbas Electronic Instrumentation
G. Pandraud Electronic Instrumentation
Paddy French Electronic Instrumentation
Research Group
Electronic Instrumentation
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Electronic Instrumentation

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