Lensless single-shot dual-wavelength digital holography for industrial metrology

Journal article (2024)

Authors

H. Shangguan ImPhys/Kalkman group - AS
HP Urbach ImPhys/Stallinga group - AS
J. Kalkman ImPhys/Computational Imaging - AS , ImPhys/Kalkman group - AS
Research Group
ImPhys/Kalkman group (AS) (TU Delft)
More Info
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Published Date

2024

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Kalkman group

Abstract

We demonstrate lensless single-shot dual-wavelength digital holography for high-speed 3D imaging in industrial inspection. Single-shot measurement is realized by combining off-axis digital holography and spatial frequency multiplexing of the two wavelengths on the detector. The system has 9.1 µm lateral resolution and a 50 µm unambiguous depth range. We determine the theoretical accuracy of off-axis dual-wavelength phase reconstruction for the case of shot-noise-limited detection. Experimental results show good agreement with the proposed model. The system is applied to industrial metrology of calibrated test samples and chip manufacturing.

Files

Ao-63-16-4427.pdf
(pdf | 3.18 Mb)
- Embargo expired in 29-11-2024
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