Fabrication of nanofluidic devices using glass-to-glass anodic bonding

Journal article (2004)

Authors

VG Kutchoukov Electronic Instrumentation - EEMCS
F. Laugere External organisation
W. van der Vlist Electronic Components, Technology and Materials - EEMCS
L.S. Pakula Electronic Instrumentation - EEMCS
Y. Garini ImPhys/Quantitative Imaging
A. Bossche Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2004

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation