Silicon micromachined terahertz spectrometer instruments

Abstract

Using newly developed silicon micromachining technology that enables low-mass and highly integrated receivers, we are developing state-of-the-art terahertz spectrometer instruments for space-based planetary and astrophysics orbiter missions. Our flexible receiver with integrated antenna architecture provides a powerful instrument capability in a light-weight, low-power consuming compact package which offer unprecedented sensitivity performance, spectral coverage, and scalability to meet the scientific requirements of multiple missions.