Low-loss Silicon MEMS Phase Shifter at 550 GHz

Rahiminejad, Sofia; Alonso, Maria; Jung-Kubiak, C.; Reck, Theodore J.; Chattopadhyay, Goutam

Low-loss Silicon MEMS Phase Shifter at 550 GHz

Conference paper (2019)

Authors

Sofia Rahiminejad California Institute of Technology

Maria Alonso California Institute of Technology

C. Jung-Kubiak California Institute of Technology

Theodore J. Reck Virginia Diodes Inc.

Goutam Chattopadhyay California Institute of Technology

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Published Date

2019

Language

English

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