Micro piezo xyO-table design for three dimensional micro machining

Conference paper (2007)

Authors

HH Langen Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J Duivenvoorden External organisation

DMT Weiler Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering

Research Group

Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:37a928b6-a627-4e55-8af8-d491c00635f1

More Info

expand_more

Published Date

2007

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design