Hot-plate emitter with distributed heating for high mid-IR output

Ghaderi, M.; Cui, Yaonian; Enoksson, Peter; Wolffenbuttel, R.F.

Hot-plate emitter with distributed heating for high mid-IR output

Conference paper (2020)

Authors

M. Ghaderi Electronic Instrumentation - , Chalmers University of Technology

Yaonian Cui

Peter Enoksson Chalmers University of Technology

R.F. Wolffenbuttel Chalmers University of Technology, Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:33bbc748-3129-406f-9dc8-2a9cfb98f7cf

More Info

expand_more

Published Date

2020

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

A suspended polySi heater is presented for use as a mid-IR light source in a microspectrometer based on a linearly variable optical filter (LVOF). Distributed electrical powering of a segmented structure with a specially designed suspension system is used for obtaining a temperature profile that is constant over the length of the element with a peak temperature significantly higher as compared to the conventional on-chip hot-wires. The integrated LVOF design results in an enhanced spectral emission and facilitates the use in the composition measurement of liquids and gases by absorption spectroscopy.