Thickness determination of thin (similar to 20 nm) microcrystalline silicon layers

Journal article (2005)

Authors

A Gordijn External organisation
J Loffler External organisation
WM Arnoldbik External organisation
F.D. Tichelaar QN/High Resolution Electron Microscopy
JK Rath External organisation
REI Schropp External organisation
Research Group
QN/High Resolution Electron Microscopy
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Published Date

2005

Language

Undefined/Unknown

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Research Group

QN/High Resolution Electron Microscopy