A micromachining post-process module for RF silicon technology

Pham, PN; Ng, TK; Bartek, M.; Sarro, P. M.; Rajaei Salmasi, B.; Burghartz, JN

A micromachining post-process module for RF silicon technology

Conference paper (2000)

Authors

PN Pham Electronic Components, Technology and Materials

TK Ng Old - EWI Ch. Integrated Sensing Devices

M. Bartek Old - EWI Ch. Integrated Sensing Devices

P. M. Sarro Electronic Components, Technology and Materials

B. Rajaei Salmasi Old - EWI Ch. Integrated Sensing Devices

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

Research Group

Electronic Components, Technology and Materials

To reference this document use:

http://resolver.tudelft.nl/uuid:32744322-c063-4af9-99d2-e3bf4fe8f53f

More Info

expand_more

Published Date

2000

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Components, Technology and Materials