Reduction of alloying temperature of metallization stacks containing Al/Ti/TiN from 400 to 300°C

Lorito, G.; Nanver, L. K.

Reduction of alloying temperature of metallization stacks containing Al/Ti/TiN from 400 to 300°C

Conference paper (2008)

Authors

G. Lorito Old - EWI Sect. ECTM

L. K. Nanver Electronic Components, Technology and Materials

Research Group

Old - EWI Sect. ECTM

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Published Date

2008

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Research Group

Old - EWI Sect. ECTM

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