Advanced excimer-laser crystallization process for single-crystalline thin film transistor

Ishihara, R; van der Wilt, PC; van Dijk, BD; Burtsev, A; Metselaar, JW; Beenakker, C. W J

Advanced excimer-laser crystallization process for single-crystalline thin film transistor

Journal article (2003)

Authors

R Ishihara Electronic Components, Technology and Materials

PC van der Wilt Electronic Components, Technology and Materials

BD van Dijk Electronic Components, Technology and Materials

A Burtsev External organisation

JW Metselaar Electronic Components, Technology and Materials

C. W J Beenakker Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2003

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Research Group

Electronic Components, Technology and Materials

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