Advanced excimer-laser crystallization process for single-crystalline thin film transistor

Journal article (2003)

Authors

R. Ishihara Electronic Components, Technology and Materials - EEMCS
PC van der Wilt Electronic Components, Technology and Materials - EEMCS
BD van Dijk Electronic Components, Technology and Materials - EEMCS
A Burtsev External organisation
JW Metselaar Electronic Components, Technology and Materials - EEMCS
C.I.M. Beenakker Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2003

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials