Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

Alkemade, Paul; Chen, P; Veldhoven, E van; Maas, D

Model for Nanopillar Growth by Focused Helium Ion-Beam-Induced Deposition

Conference paper (2010)

Authors

Paul Alkemade QN/Kavli Nanolab Delft

P Chen QN/Kavli Nanolab Delft

E van Veldhoven External organisation

D Maas External organisation

Research Group

QN/Kavli Nanolab Delft

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Published Date

2010

Language

English

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Research Group

QN/Kavli Nanolab Delft

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