Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns

Jiang, XR; Barth, JE; Kruit, P.

Combined calculation of lens aberrations, space charge aberrations and statistical Coulomb effects in charged particle optical columns

Journal article (1996)

Authors

XR Jiang ImPhys/Charged Particle Optics

JE Barth ImPhys/Charged Particle Optics

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

1996

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Research Group

ImPhys/Charged Particle Optics