Photonic pressure sensor in silicon on insulator

Harmsma, P.J.; Engelmann, M. J.; Schmits, R.; Westerveld, W.J.; van den Berg, J.H.; Agovic, K; van Vliet, R.E.; Yousefi, M

Photonic pressure sensor in silicon on insulator

Conference paper (2009)

Authors

P.J. Harmsma TNO

M. J. Engelmann TNO

R. Schmits TNO

W.J. Westerveld TNO

J.H. van den Berg TNO

K Agovic TNO

R.E. van Vliet TNO

M Yousefi TNO

Affiliation

External organisation

To reference this document use:

http://resolver.tudelft.nl/uuid:272ad2d2-d838-4358-b5ad-c7c5d0c7606c

More Info

expand_more

Published Date

2009

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Affiliation

External organisation