Towards fast AFM-based nanometrology and nanomanufacturing

Journal article (2012)

Authors

G Schitter Mechatronic Systems Design
J. Steininger External organisation
FCA Heuck Micro and Nano Engineering
URS Staufer Micro and Nano Engineering
Research Group
Mechatronic Systems Design
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Published Date

2012

Language

English

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Research Group

Mechatronic Systems Design