(Invited) Printed Poly-Si TFTs on Paper for Beyond Plastic Electronics

Journal article (2018)

Authors

R. Ishihara Quantum Integration Technology , QID/Ishihara Lab - QuTech Advanced Research Centre

M. Trifunovic QID/Ishihara Lab - QuTech Advanced Research Centre

P.M. Sberna EKL Equipment -

T Shimoda Japan Advanced Institute of Science and Technology

Research Group

QID/Ishihara Lab (QuTech Advanced Research Centre) (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:1fa44325-b766-47e7-b086-f97dee1dafc7

More Info

expand_more

Published Date

2018

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

QuTech Advanced Research Centre

Department

Quantum Internet Division

Research Group

QID/Ishihara Lab

Abstract

Silicon can be printed using liquid silicon ink, which is a mixture of polymerized cyclopentasilane (CPS) and a solvent. Thermal annealing higher than 350oC of this material, however, was necessary, to convert it to solid silicon, which prevented its usage on inexpensive substrates with a limited thermal budget. We review a novel method that forms polycrystalline silicon (poly-Si) patterns directly on paper using the same liquid silicon with doctor-blade coating and local irradiation of excimer-laser with room temperature process. We review also the process and electrical properties of poly-Si TFTs fabricated on the paper. This technique will breakthrough the printed electronics by enabling applications such as fast printed electronics that are inexpensive, fully-recyclable, biodegradable and even edible.