Effect of the pulse offset on the thermal cycle for double excimer laser annealing of implanted silicon

Conference paper (2009)

Authors

V Gonda Old - EWI Sect. ECTM
L. K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2009

Language

English

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Research Group

Old - EWI Sect. ECTM