Development of Silicon Micromachined Microlens Antennas at 1.9 THz

Alonso-Delpino, Maria; Reck, Theodore; Jung-Kubiak, C.; Lee, Choonsup; Chattopadhyay, G.

Development of Silicon Micromachined Microlens Antennas at 1.9 THz

Journal article (2017)

Authors

Maria Alonso-Delpino California Institute of Technology

Theodore Reck California Institute of Technology

C. Jung-Kubiak California Institute of Technology

Choonsup Lee California Institute of Technology

G. Chattopadhyay California Institute of Technology

Affiliation

External organisation

Antenna Submillimeter wave Lens Leaky-wave terahertz (THz) Microlens Shallow lens

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Published Date

2017-3

Language

English

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Abstract

The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.

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