Al/Si contacting of ultra-shallow epitaxially grown SI and SiGe junctions

Journal article (2001)

Authors

Q Ren Old - EWI Sect. ECTM
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
C.C.G. Visser Electronic Components, Technology and Materials - EEMCS
JW Slotboom Electronic Components, Technology and Materials - EEMCS
Research Group
Old - EWI Sect. ECTM
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - EWI Sect. ECTM