Interactive effects in reactive ion etching of W1-xGex

Journal article (1997)

Authors

EWJM Van Der Drift QN/Kavli Nanolab Delft - AS
BQ Dinh External organisation
PA Verhoeven External organisation
EJM Fakkeldij External organisation
T Zijlstra QN/Kavli Nanolab Delft - AS
Research Group
QN/Kavli Nanolab Delft (AS) (TU Delft)
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Published Date

1997

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Kavli Nanolab Delft