Interactive effects in reactive ion etching of W1-xGex

Journal article (1997)

Authors

E.W.J.M. van der Drift QN/Kavli Nanolab Delft
BQ Dinh External organisation
PA Verhoeven External organisation
EJM Fakkeldij External organisation
T Zijlstra QN/Kavli Nanolab Delft
Research Group
QN/Kavli Nanolab Delft
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Published Date

1997

Language

Undefined/Unknown

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Research Group

QN/Kavli Nanolab Delft

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