Influence of Coulomb interactions on choice of magnification, aperture size and source brightness in a two lens focused ion beam column

Journal article (1996)

Authors

Pieter Kruit ImPhys/Charged Particle Optics
XR Jiang ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
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Published Date

1996

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics