A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

Ayerden, N.P.; Mandon, Julien; Ghaderi, M.; Harren, Frans J.M.; Wolffenbuttel, R.F.

A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

Conference paper (2017)

Authors

N.P. Ayerden Electronic Instrumentation -

Julien Mandon Radboud Universiteit Nijmegen

M. Ghaderi Electronic Instrumentation -

Frans J.M. Harren Radboud Universiteit Nijmegen

R.F. Wolffenbuttel Electronic Instrumentation -

Research Group

Electronic Instrumentation () (TU Delft)

Infrared spectroscopy Gas sensors Absorption Optical filters Micromechanical devices Light reflection Light absorption Bragg gratings Mirrors Optical resonators Resonator filters Optical reflection Linear variable optical filter Optical filters Cavity resonators Absorption path Effective optical absorption path length Functional integration Gas-filled LVOF High-order filter operation Highly reflective Bragg mirror Hydrocarbon gas analysis Light source Midinfrared absorption spectroscopy On-chip gas absorption microspectrometer Photonic microsystem Physical path length Single MEMS device Tapered cavity

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Published Date

2017

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.

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