Fiber-coupled displacement interferometry without periodic nonlinearity

Journal article (2011)

Authors

J.D. Ellis Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
A.J.H. Meskers Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
J.W. Spronck Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R.H. Munnig Schmidt Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2011

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design

Abstract

Displacement interferometry is widely used for accurately characterizing nanometer and subnanometer displacements in many applications. In many modern systems, fiber delivery is desired to limit optical alignment and remove heat sources from the system, but fiber delivery can exacerbate common interferometric measurement problems, such as periodic nonlinearity, and account for fiber-induced drift. In this Letter, we describe a novel, general Joo-type interferometer that inherently has an optical reference after any fiber delivery that eliminates fiber-induced drift. This interferometer demonstrated no detectable periodic nonlinarity in both free-space and fiber-delivered variants.