In situ monitoring and control of material growth for high resolution electron beam induced deposition

van Dorp, W.F.; Hagen, C.W.; Crozier, P.A.; Kruit, P.

In situ monitoring and control of material growth for high resolution electron beam induced deposition

Journal article (2007)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics

C.W. Hagen ImPhys/Charged Particle Optics

P.A. Crozier External organisation

P. Kruit ImPhys/Charged Particle Optics

Research Group

ImPhys/Charged Particle Optics

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Published Date

2007

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Research Group

ImPhys/Charged Particle Optics