Two-dimension fiber optic sensor for high-resolution and long-range linear measurements

Journal article (2010)

Authors

A. Khiat Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
F Lamarque External organisation
C Prelle External organisation
Ph Pouille External organisation
M Leester-Schadel External organisation
S Büttgenbach External organisation
Research Group
Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2010

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering

Abstract

A fiber optic sensor for two-dimension linear displacement measurements is described. This sensor can have resolution and range in nanometer and millimeter scales, respectively. After validation of the sensor principle in one dimension, the displacement methods in two dimensions are described and the experimental measurements are realized by the use of the sensor and high precision actuators. The best and the worst displacement cases are realized with measured limits of resolution of 27.4 nm and 38.7 nm in the range of 8.67 mm and 13.03 mm, respectively.