Arbitrarily shallow arsenic deposited junctions on silicon tuned by excimer laser annealing

Conference paper (2010)

Authors

G. Lorito Electronic Components, Technology and Materials - EEMCS
L Qi External organisation
L.K. Nanver Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials