Lithographic alignment offset compensation for substrate transfer processes

van Zeijl, H.W.; Nanver, L.K.; Bijnen, FGC; Goudena, E.J.G.; Slabbekoorn, JHCM

Lithographic alignment offset compensation for substrate transfer processes

Conference paper (2005)

Authors

H.W. van Zeijl Electronic Components, Technology and Materials -

L.K. Nanver Electronic Components, Technology and Materials -

FGC Bijnen External organisation

E.J.G. Goudena Old - EWI Sect. ECTM

JHCM Slabbekoorn Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2005

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials