Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

Golshani, N.; Mohammadi, V.; Schellevis, H.; Beenakker, C. W J; Ishihara, Ryoichi

Research Update: Reactively sputtered nanometer-thin ZrN film as a diffusion barrier between Al and boron layers for radiation detector applications

Journal article (2014)

Authors

N. Golshani Electronic Components, Technology and Materials

V. Mohammadi Electronic Components, Technology and Materials

H. Schellevis Electronic Components, Technology and Materials

C. W J Beenakker Electrical Engineering, Mathematics and Computer Science

Ryoichi Ishihara Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2014

Language

English

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Research Group

Electronic Components, Technology and Materials

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