Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

Conference paper (2001)

Authors

B Krause External organisation
GB Koops External organisation
NFA van der Vegt External organisation
M Wessling External organisation
J. van Turnhout Old - sect Polymer Materials and Engineering (DCT/PME)
M Wübbenhorst Old - sect Polymer Materials and Engineering (DCT/PME)
Research Group
Old - sect Polymer Materials and Engineering (DCT/PME)
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Published Date

2001

Language

Undefined/Unknown

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Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)