Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

Krause, B; Koops, GB; van der Vegt, NFA; Wessling, M; Turnhout, Jan van; Wübbenhorst, M

Novel thin film polymer foaming technique for low and ultralow-k dielectrics.

Conference paper (2001)

Authors

B Krause External organisation

GB Koops External organisation

NFA van der Vegt External organisation

M Wessling External organisation

Jan van Turnhout Old - sect Polymer Materials and Engineering (DCT/PME)

M Wübbenhorst Old - sect Polymer Materials and Engineering (DCT/PME)

Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)

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Published Date

2001

Language

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Research Group

Old - sect Polymer Materials and Engineering (DCT/PME)

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