Surface-charge-layer sheet-resistance measurements for evaluating interface RF losses on high-resistivity-silicon substrates

Evseev, S.B.; Nanver, LK; Milosaviljevic, S

Surface-charge-layer sheet-resistance measurements for evaluating interface RF losses on high-resistivity-silicon substrates

Journal article (2012)

Authors

S.B. Evseev Electronic Components, Technology and Materials -

LK Nanver Electronic Components, Technology and Materials -

S Milosaviljevic External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:044bcb07-ab0b-4fcf-81f4-3f16feaa970f

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Published Date

2012

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials