A theoretical and experimental study of the piezojunction effect in silicon and its application in new sensor structures STW: Del.3908-5

Report (2001)

Authors

F Fruett Electronics - EEMCS
G.C.M. Meijer Electronic Instrumentation - EEMCS
Research Group
Electronics (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronics