Determination of line edge roughness in low-dose top-down scanning electron microscopy images

Journal article (2014)

Authors

T. Verduin ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2014

Language

English

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Research Group

ImPhys/Charged Particle Optics