Formation of location-controlled crystalline islands using substrate-embedded seeds in excimer-laser crystallization of silicon films

van der Wilt, PC; van Dijk, BD; Bertens, GJ; Ishihara, R.; Beenakker, C.I.M.

Formation of location-controlled crystalline islands using substrate-embedded seeds in excimer-laser crystallization of silicon films

Journal article (2001)

Authors

PC van der Wilt Electronic Components, Technology and Materials -

BD van Dijk Electronic Components, Technology and Materials -

GJ Bertens Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials