A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range

Conference paper (2013)

Authors

R. Yang Electronic Instrumentation - EEMCS
S. Nihtianova Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2013

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation