Physical principles and miniaturization of spark assisted chemical engraving (SACE)

Conference paper (2005)

Authors

LA Hof Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
R Wüthrich External organisation
K Fujisaki External organisation
H Bleuler External organisation
Ph Mandin External organisation
G Picard External organisation
Research Group
Mechatronic Systems Design (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

Reuse Rights

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Mechatronic Systems Design