Determining the material structure of microcrystalline silicon from Raman spectra

Smit, C; van Swaaij, R.A.C.M.M.; Donker, H; Petit, AMHN; Kessels, WMM; van de Sanden, MCM

Determining the material structure of microcrystalline silicon from Raman spectra

Journal article (2003)

Authors

C Smit Electronic Components, Technology and Materials -

R.A.C.M.M. van Swaaij Electronic Components, Technology and Materials -

H Donker Old - sect Laboratory Inorganic Chemistry (DCT/AC)

AMHN Petit Electronic Components, Technology and Materials -

WMM Kessels External organisation

MCM van de Sanden External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

To reference this document use:

http://resolver.tudelft.nl/uuid:0031e734-32d3-47dc-a9b2-b4de2403a2b0

More Info

expand_more

Published Date

2003

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials